Optical characterization of spherical microlenses: a round robin experiment within the EC Network of Excellence on Micro-Optics (NEMO)

Heidi Ottevaere; Johannes Schwider; Jürgen Lamprecht; Jacek Kacperski; Anna Szpak; Lothar Steinbock; Ken Weible; Hugo Thienpont

doi:10.1117/12.663597

28 April 2006 Optical characterization of spherical microlenses: a round robin experiment within the EC Network of Excellence on Micro-Optics (NEMO)

Heidi Ottevaere, Johannes Schwider, Jürgen Lamprecht, Jacek Kacperski, Anna Szpak, Lothar Steinbock, Ken Weible, Hugo Thienpont

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Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 618818 (2006) https://doi.org/10.1117/12.663597
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Today there exist different commercial and proprietary micro-optics measurement instruments for the characterization of micro-optical components and microlenses in particular. However there is often a lack of a complete quantitative optical characterization of the latter components. Therefore we will focus in this paper on the optical characterization of spherical microlenses. Moreover the results of the performed round robin within the European 6th FP Network of Excellence on Micro-optics "NEMO" will allow us to select the most appropriate instrumentation tools for characterizing refractive spherical microlenses.

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Heidi Ottevaere, Johannes Schwider, Jürgen Lamprecht, Jacek Kacperski, Anna Szpak, Lothar Steinbock, Ken Weible, and Hugo Thienpont "Optical characterization of spherical microlenses: a round robin experiment within the EC Network of Excellence on Micro-Optics (NEMO)", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 618818 (28 April 2006); https://doi.org/10.1117/12.663597

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KEYWORDS

Microlens

Source mask optimization

Spherical lenses

Micro optics

Beam splitters

Interferometers

Microscopes

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