Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO)

H. Ottevaere; N. Destouches; C. Gorecki; T. Kossek; S. Pelli; R. Piramidowicz; P. Szcepanski; M. Kujawinska

doi:10.1117/12.663888

28 April 2006 Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO)

H. Ottevaere, N. Destouches, C. Gorecki, T. Kossek, S. Pelli, R. Piramidowicz, P. Szcepanski, M. Kujawinska

Author Affiliations +

Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 618819 (2006) https://doi.org/10.1117/12.663888
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

In this paper we give an overview of the results obtained after benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics NEMO. After a call within the NEMO network six different partners decided to organize a round robin. In this paper we will give an overview of all the experimental values obtained in the 6 different round robins, then we will comment on these results by explaining the measurement differences and the uncertainties for all measurands.

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H. Ottevaere, N. Destouches, C. Gorecki, T. Kossek, S. Pelli, R. Piramidowicz, P. Szcepanski, and M. Kujawinska "Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO)", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 618819 (28 April 2006); https://doi.org/10.1117/12.663888

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