Paper
22 April 2006 Hybrid sensors using laser targeting
Nabeel A. Riza, Farzan Ghauri, Frank Perez
Author Affiliations +
Abstract
Proposed, to the best of our knowledge, is the first extreme environment wireless all-in-one hybrid temperature plus pressure sensor using a remoted thick single crystal Silicon Carbide chip within a pressurized capsule. Analysis and experiments are reported for the pressure aspect of the sensor for pressures up to 40 atms.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nabeel A. Riza, Farzan Ghauri, and Frank Perez "Hybrid sensors using laser targeting", Proc. SPIE 6189, Optical Sensing II, 618905 (22 April 2006); https://doi.org/10.1117/12.663118
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Silicon carbide

Sensors

Mirrors

Charge-coupled devices

Temperature metrology

Environmental sensing

Crystals

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