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9 May 2006 Reliability studies of micro-optical components in NEMO
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Abstract
We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics "NEMO". We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization methods as well as first results and the perspectives for future research.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Berghmans, M. Van Uffelen, S. Eve, E. Ernst, A. Last, D. Rabus, N. Huber, O. Kraft, A. Andrei, L. Nieradko, K. Krupa, M. Jozwik, C. Gorecki, L. Hirsinger, P. Delobelle, P. Kniazewski, L. Salbut, and M. Kujawinska "Reliability studies of micro-optical components in NEMO", Proc. SPIE 6193, Reliability of Optical Fiber Components, Devices, Systems, and Networks III, 61930A (9 May 2006); https://doi.org/10.1117/12.662001
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