Simulation of light scattering for surfaces with statistically distributed subwavelength cavities

A. Tausendfreund; S. Patzelt; D. Mader; S. Simon; G. Goch

doi:10.1117/12.661724

20 April 2006 Simulation of light scattering for surfaces with statistically distributed subwavelength cavities

A. Tausendfreund, S. Patzelt, D. Mader, S. Simon, G. Goch

Proceedings Volume 6195, Nanophotonics; 619511 (2006) https://doi.org/10.1117/12.661724
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

This paper deals with an efficient computation method for scattered light intensity distributions, which occur, if a nanostructured surface is illuminated with a monochromatic laser beam of several millimeters in diameter. The minimization of the computational amount is an essential precondition in connection with the development of powerful design tools for laser optical surface measuring methods, which derive structure characterizing attributes from structure dependent scattering effects. The presented approach differs from concepts based on near-field solutions of the Maxwell equations (finite element methods (FEM), finite difference time domain methods (FDTD)) or approximation methods for the near-field (Discrete Dipole Approximation (DDA), Generalized Multipole Technique (GMT)) as the near-field is not computed. Instead, an electrically equivalent model based on pre-computed radiation sources like Huygens point sources, dipoles, quadrupoles, etc. is used, which for standard geometrical nanostructures (cylindrical holes, spheres and ellipsoids) leads to the same far-field distributions as the conventional methods. In order to simulate the scattered light by an arbitrary surface it is divided into subwavelength geometries, which can be substituted by electrically equivalent dipole radiation sources. The far-field is calculated with a numerical scalar method. The computational effort is much smaller compared to algorithms based on the solution of Maxwell's equations.

Citation Download Citation

A. Tausendfreund, S. Patzelt, D. Mader, S. Simon, and G. Goch "Simulation of light scattering for surfaces with statistically distributed subwavelength cavities", Proc. SPIE 6195, Nanophotonics, 619511 (20 April 2006); https://doi.org/10.1117/12.661724

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