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19 May 2006 Examination of quantum cascade laser source for a MEMS-scale photoacoustic chemical sensor
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Abstract
Photoacoustic spectroscopy is a useful monitoring technique that is well suited for trace gas detection. The technique also possesses favorable detection characteristics when the system dimensions are scaled to a micro-system design. The objective of present work is to incorporate two strengths of the Army Research Laboratory (ARL), Quantum Cascade Laser (QCL) source development and chemical and biological sensing into a monolithic micro-electromechanical systems (MEMS) photoacoutic trace gas sensor. Past examination of a one quarter scale photoacoustic (PA) macro-cell has indicated a pathway to incorporate a photoacoustic resonance structure in a micro-mechanical platform. Initial studies involve the incorporation of a QCL source operating @ ~3.45 μm into the PA macro-cell system as a means to discern proper operational characteristics in relation to the photoacoustic cell design. Results will be presented describing beam conditioning, modulation control and wavelength selection associated with the QCL source. Some preliminary information regarding MEMS-scale designs based off of hybrid concept, involving commercially available microphone and fully fabricated MEMS photoacoustic resonator will be described.
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David A. Heaps and Paul M. Pellegrino "Examination of quantum cascade laser source for a MEMS-scale photoacoustic chemical sensor", Proc. SPIE 6218, Chemical and Biological Sensing VII, 621805 (19 May 2006); https://doi.org/10.1117/12.670040
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