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5 May 2006 MEMS-based force-detected nuclear magnetic resonance (FDNMR) spectrometer
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Abstract
The motivation for the work reported is portable NMR spectroscopy of liquids and solids with higher sensitivity than inductive detection and without the need for tuned elements specific to the frequency of each isotope observed. The fabrication and assembly of a BOOMERANG force-detected nuclear magnetic resonance (NMR) spectrometer is reported. The design is optimal for samples of ~ 50 micron diameter and realizes tolerances of ~1 micron in the Si and ferromagnetic parts. Optical lithography, electrodeposition, reactive ion etching, and release of the moving part by solution etching are key methods used. Resistance to delamination of the ferromagnetic material was achieved by Cr/Au deposition prior to electrodeposition of 85/15 Co:Ni.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Choonsup Lee, Mark C. Butler, Ramez A. Elgammal, Thomas George, Brian Hunt, and Daniel P. Weitekamp "MEMS-based force-detected nuclear magnetic resonance (FDNMR) spectrometer", Proc. SPIE 6223, Micro (MEMS) and Nanotechnologies for Space Applications, 622302 (5 May 2006); https://doi.org/10.1117/12.665692
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