Integration of MEMS phase shifters with CMOS control circuitry

Ali Darwish; Tom Farmer; Kamal Ali; Mona Zaghloul; H. A. Hung; E. Viveiros

doi:10.1117/12.666102

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18 May 2006 Integration of MEMS phase shifters with CMOS control circuitry

Ali Darwish, Tom Farmer, Kamal Ali, Mona Zaghloul, H. A. Hung, E. Viveiros

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Proceedings Volume 6223, Micro (MEMS) and Nanotechnologies for Space Applications; 622303 (2006) https://doi.org/10.1117/12.666102
Event: Defense and Security Symposium, 2006, Orlando (Kissimmee), Florida, United States

Abstract

A CMOS digital microcircuit, utilizing sub-micron technology, was designed for the purpose of providing integrated control circuitry to an array of high-voltage micro-electromechanical systems (MEMS) switch based phase shifter devices. The grid of MEMS phase shifters is part of a phased array antenna system. The phase of each element of the array is controlled via the CMOS microcircuit. This paper presents the design, physical layout, and the measured test results for CMOS digital control circuit that has been fabricated using the MOSIS Integrated Circuit Fabrication Service. The circuit converts serial data to parallel outputs to reduce number of control lines and lower the cost of wiring the phased array. In addition, discrete digital control circuitry for loading phase shifts into each MEMS device is presented.

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Ali Darwish, Tom Farmer, Kamal Ali, Mona Zaghloul, H. A. Hung, and E. Viveiros "Integration of MEMS phase shifters with CMOS control circuitry", Proc. SPIE 6223, Micro (MEMS) and Nanotechnologies for Space Applications, 622303 (18 May 2006); https://doi.org/10.1117/12.666102

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