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18 May 2006 High frequency piezoelectric micromachined ultrasonic transducers for imaging applications
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Methods for fabricating high frequency ultrasound transducer and array based on piezoelectric films and MEMS technology are presented in this paper. Piezoelectric PZT films up to 30 μm-thick deposited on silicon substrate have been prepared by a modified sol-gel process. The raw materials included lead acetate trihydrate and zirconium n-propoxide and titanate isoproxide. The sol-gel PZT solutions were prepared using above materials and 2-methoxyethanol as the solvent. Spin-coated films were annealed at 750 oC by a rapid thermal annealing (RTA) process. Thicker PZT films were fabricated by repeating this process and using a modified PZT composite solution. The high frequency single element transducers actuated by the PZT films were fabricated and pulse-echo measurement results show the transducers had a broad bandwidth and high central frequencies. The beam profile of one 103 MHz transducer was measured using a 8 μm diameter wire and a lateral resolution of 33 μm was observed. A micromachined process to fabricate high frequency linear array will be also presented.
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Q. F. Zhou, K. K. Shung, Q. Zhang, and F. T. Djuth "High frequency piezoelectric micromachined ultrasonic transducers for imaging applications", Proc. SPIE 6223, Micro (MEMS) and Nanotechnologies for Space Applications, 62230H (18 May 2006);

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