Development of two-dimensional scanning probe arrays for dip-pen nanolithography (DPN)

Jun Zou; Xuefeng Wang; David Bullen; Chang Liu; Chad Mirkin

doi:10.1117/12.666389

18 May 2006 Development of two-dimensional scanning probe arrays for dip-pen nanolithography (DPN)

Jun Zou, Xuefeng Wang, David Bullen, Chang Liu, Chad Mirkin

Proceedings Volume 6223, Micro (MEMS) and Nanotechnologies for Space Applications; 62230N (2006) https://doi.org/10.1117/12.666389
Event: Defense and Security Symposium, 2006, Orlando (Kissimmee), Florida, United States

Abstract

In this paper, we report the development of two-dimensional scanning probe arrays to achieve high-throughput DPN writing in a parallel mode. A new "mold-and-transfer" micromachining process has been developed, which is capable of making large scanning probe arrays with high yield and at low cost. Up to date, two-dimensional passive probe arrays with 1000 metal probes and 1000,000 polymer probes have been successfully developed. Prototypes of two-dimensional active probe arrays have also been successfully fabricated and tested, which consists of 49 scanning probe individually controlled by a thermal bimorph micro actuator integrated on each probe. To ensure proper contact status of each probe on the sample surface, a new electrical probe-substrate contact sensing method has also been developed for two-dimensional DPN probe arrays to realize robust DPN writing. As such, 2D DPN writing has been successfully demonstrated for the first time.

Citation Download Citation

Jun Zou, Xuefeng Wang, David Bullen, Chang Liu, and Chad Mirkin "Development of two-dimensional scanning probe arrays for dip-pen nanolithography (DPN)", Proc. SPIE 6223, Micro (MEMS) and Nanotechnologies for Space Applications, 62230N (18 May 2006); https://doi.org/10.1117/12.666389

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