Simultaneous fitting of several x-ray rocking curves from different crystallographic planes of multilayer heterostructures

M. A. Chuev; A. A. Lomov; R. M. Imamov; I. A. Ivanov

doi:10.1117/12.683399

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10 June 2006 Simultaneous fitting of several x-ray rocking curves from different crystallographic planes of multilayer heterostructures

M. A. Chuev, A. A. Lomov, R. M. Imamov, I. A. Ivanov

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Proceedings Volume 6260, Micro- and Nanoelectronics 2005; 626014 (2006) https://doi.org/10.1117/12.683399
Event: Micro- and Nanoelectronics 2005, 2005, Zvenigorod, Russian Federation

Abstract

A general mathematical approach is realized for simultaneous treatment of several X-ray rocking curves from different crystallographic planes. The corresponding analysis of experimental X-ray rocking curves for (004), (113) and (115) reflections from the single quantum well GaAs-In_xGa_1-xAs/GaAs(001) heterostructure have been carried out. This approach allows one to restore the depth profiles of the lattice mismatch and mean-square displacements of atoms from regular positions for particular layers as well as to estimate the anisotropy of in-plane and normal-to-plane random atom displacements.

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M. A. Chuev, A. A. Lomov, R. M. Imamov, and I. A. Ivanov "Simultaneous fitting of several x-ray rocking curves from different crystallographic planes of multilayer heterostructures", Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 626014 (10 June 2006); https://doi.org/10.1117/12.683399

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