Recent development of micropore optics using MEMS technologies

Yuichiro Ezoe; Masaki Koshiishi; Makoto Mita; Kazuhisa Mitsuda; Yoshitaka Ishisaki; Akio Hoshino; Zhen Yang; Takayuki Takano; Harutaka Mekaru; Ryutaro Maeda

doi:10.1117/12.670736

13 June 2006 Recent development of micropore optics using MEMS technologies

Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita, Kazuhisa Mitsuda, Yoshitaka Ishisaki, Akio Hoshino, Zhen Yang, Takayuki Takano, Harutaka Mekaru, Ryutaro Maeda

Author Affiliations +

Proceedings Volume 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray; 62661B (2006) https://doi.org/10.1117/12.670736
Event: SPIE Astronomical Telescopes + Instrumentation, 2006, Orlando, Florida , United States

Abstract

Recent development of the extremely light-weight micro pore optics based on the semiconductor MEMS (Micro Electro Mechanical System) technologies is reported. Anisotropic chemical wet etching of silicon (110) wafers were utilized, in order to obtain a row of smooth (111) side walls vertical to the wafer face and to use them as X-ray mirrors. To obtain high performance mirrors with smooth surfaces and a high aspect ratio, several modifications were made to our previous manufacturing process shown in Ezoe et al. (2005). After these improvements, smooth surfaces with rms roughness of the order of angstroms and also a high aspect ratio of 20 were achieved. Furthermore, a single-stage optic was designed as a first step to multi-stage optics. A mounting device and a slit device for the sample optic were fabricated fully using the MEMS technologies and evaluated.

Citation Download Citation

Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita, Kazuhisa Mitsuda, Yoshitaka Ishisaki, Akio Hoshino, Zhen Yang, Takayuki Takano, Harutaka Mekaru, and Ryutaro Maeda "Recent development of micropore optics using MEMS technologies", Proc. SPIE 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray, 62661B (13 June 2006); https://doi.org/10.1117/12.670736

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