Perturbation techniques in the problems of computational charged particle optics

Dmitry Greenfield; Mikhail A. Monastryskiy; Victor A. Tarasov

doi:10.1117/12.693186

31 May 2006 Perturbation techniques in the problems of computational charged particle optics

Dmitry Greenfield, Mikhail A. Monastryskiy, Victor A. Tarasov

Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 627804 (2006) https://doi.org/10.1117/12.693186
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation

Abstract

Basing on perturbation technique, discussed are some urgent problems of computational charged particle optics including numerical evaluation of fringe fields and field perturbations caused by small deviation of the shape of electrodes from rotational or planar symmetry as well as aberrational analysis of charged particle beams in the most general tensor form. It is shown that perturbation technique, being combined with other numerical approaches such as the tau- variations method and generalized method of initial parameters variation, proves to be most promising for evaluation of mechanical tolerances and simulation of Coulomb repulsion effects and charged particles scattering upon a fine-structure grid.

Citation Download Citation

Dmitry Greenfield, Mikhail A. Monastryskiy, and Victor A. Tarasov "Perturbation techniques in the problems of computational charged particle optics", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 627804 (31 May 2006); https://doi.org/10.1117/12.693186

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