Nanomeasuring and nanopositioning engineering

G. Jäger; T. Hausotte; E. Manske; H.-J. Büchner; R. Mastylo; N. Dorozhovets; N. Hofmann

doi:10.1117/12.715237

25 October 2006 Nanomeasuring and nanopositioning engineering

G. Jäger, T. Hausotte, E. Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets, N. Hofmann

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 628001 (2006) https://doi.org/10.1117/12.715237
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm is explained. An Abbe offset-free design of three miniature plan mirror interferometers and applying a new concept for compensating systematic errors resulting from mechanical guide systems provide very small uncertainties of measurement. The NPM-Machine has been developed by the Institute of Process Measurement and Sensor Technology of the Technische Universitaet Ilmenau and manufactured by the SIOS Messtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB), Germany. The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor, tactile stylus probe and of a 3D-micro-touch-probe are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.

Citation Download Citation

G. Jäger, T. Hausotte, E. Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets, and N. Hofmann "Nanomeasuring and nanopositioning engineering", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628001 (25 October 2006); https://doi.org/10.1117/12.715237

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