Study on a high precision piezoelectric resonators quartz crystal temperature sensor by means of three dimensional finite element method

Hong Ai; Xin Li; Bo You; Haiying Wang; Jun Xu

doi:10.1117/12.716133

13 October 2006 Study on a high precision piezoelectric resonators quartz crystal temperature sensor by means of three dimensional finite element method

Hong Ai, Xin Li, Bo You, Haiying Wang, Jun Xu

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Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62801A (2006) https://doi.org/10.1117/12.716133
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

A new type of piezoelectric resonance quartz crystal temperature sensors which exhibits a high precision and a good stability has been developed. A Y-cut (4.05°) quartz resonator operating on low-frequency thickness C-mode was chosen as the temperature sensor because of its availability and its good linear frequency versus temperature characteristic. In order to reduce the mounting effects and to decouple interfering modes of motion, the contour structures of the quartz wafers having a biconvex type and bat metallic electrodes with the sine ripple on the surfaces of the quartz wafer are used. The resonance frequency was analyzed by three-dimensional Finite Element Method and the results are compared with the theoretical values whenever they are available. Using low-cost oscillators connected to a microcontroller, a precise measurement system of temperature is implemented. Experimentally, the accuracy of measurement is better than 0.05 degree C (The errors include non-linearity, reproducibility and influence of load temperature) over the temperature range -60 degree C to 200 degree C.

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Hong Ai, Xin Li, Bo You, Haiying Wang, and Jun Xu "Study on a high precision piezoelectric resonators quartz crystal temperature sensor by means of three dimensional finite element method", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62801A (13 October 2006); https://doi.org/10.1117/12.716133

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KEYWORDS

Quartz

Crystals

Resonators

Temperature metrology

Temperature sensors

Finite element methods

Semiconducting wafers

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