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13 October 2006 3D reconstruction of micro surface based on optics technique
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Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62802F (2006) https://doi.org/10.1117/12.716372
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China
Abstract
More and more precise parts are being required in modern domains of scientific research and manufacturing industry, which urges the corresponding measuring technologies to ameliorate and innovate, especially in micro-nanometer scale. The paper gives a detailed introduction about the optics interferometry and digital image processing technology respectively. Then, a 3D reconstruction method based on interferometry and image processing is described in the paper to solve surface measuring problem of a kind of planar part. The method can show the microcosmic surface of the part distinctly. At the same time, some parameters of the part can be calculated to reflect the manufacturing quality. According to these parameters, the conclusion on whether the part is qualified or not can be made, some another conclusion on how to modify the part for better result can also be determined. At last, some experiments have been done to verify the effect of the method. The method is simple, convenient and practical. Its measurement capability is between atomic force microscope and coordinate measurement machine.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Y. B. Zhang, H. Xiao, and F. Ji "3D reconstruction of micro surface based on optics technique", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62802F (13 October 2006); https://doi.org/10.1117/12.716372
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