Near-field induced polarization imaging for optical data storage metrology

Tao Chen; Tom D. Milster

doi:10.1117/12.685172

22 June 2006 Near-field induced polarization imaging for optical data storage metrology

Tao Chen, Tom D. Milster

Proceedings Volume 6282, Optical Data Storage 2006; 62820D (2006) https://doi.org/10.1117/12.685172
Event: Optical Data Storage 2006, 2006, Montréal, Canada

Abstract

Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ±2nm for obtaining height information.

Citation Download Citation

Tao Chen and Tom D. Milster "Near-field induced polarization imaging for optical data storage metrology", Proc. SPIE 6282, Optical Data Storage 2006, 62820D (22 June 2006); https://doi.org/10.1117/12.685172

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available