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28 August 2006 Analysis of (TiO2)X(Ta2O5)1-X composite films prepared by radio frequency ion beam sputtering deposition
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Abstract
Using two or more materials to deposit a composite film has an advantage to get a film with desired refractive index. Besides, its optical property and mechanical property are better than a film deposited by a single material. In this study, (TiO2)X(Ta2O5)1-X composite films have been prepared by a radio frequency ion beam sputtering deposition (RF-IBSD) where x was determined by the area ratio of titanium to tantalum targets. The optical constants of (TiO2)X(Ta2O5)1-X composite films were calculated from their spectra by using envelope method. The refractive indices ranged from 2.481 to 2.165 at 550nm, and the extinction coefficients were lower than 1x10-3 for wavelength in the ranges of 400nm to 600nm and lower than 1x10-4 for wavelength longer than 600nm. The surface roughness of all composite films was about 0.1nm. The stress decreased from -520MPa for pure TiO2 film to less than -280MPa for the composite films as measured by a phase-shift Twyman-Green interferometer. When the content of TiO2 was less than 79.5%, the composite films were amorphous even post-baked to 400°C as measured by x-ray diffraction. The composite films mixed with TiO2 and Ta2O5 can improve thermal stability and reduce extinction coefficient and stress. Composite films can replace the conventional high refractive index layer prepared by a single material to fabricate multilayer filters, and it is also suitable for high temperature applications, such as high reflection coating of projector lamps.
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Chien-Jen Tang, Yung-Chi Wu, and Cheng-Chung Lee "Analysis of (TiO2)X(Ta2O5)1-X composite films prepared by radio frequency ion beam sputtering deposition", Proc. SPIE 6286, Advances in Thin-Film Coatings for Optical Applications III, 628603 (28 August 2006); https://doi.org/10.1117/12.676233
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