Transmission ellipsometry of transparent-film transparent-substrate systems: polynomial inversion for the substrate optical constant

M. Elshazly-Zaghloul; Y. A. Zaghloul; A. R. M. Zaghloul

doi:10.1117/12.681006

28 August 2006 Transmission ellipsometry of transparent-film transparent-substrate systems: polynomial inversion for the substrate optical constant

M. Elshazly-Zaghloul, Y. A. Zaghloul, A. R. M. Zaghloul

Author Affiliations +

Proceedings Volume 6286, Advances in Thin-Film Coatings for Optical Applications III; 62860G (2006) https://doi.org/10.1117/12.681006
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

A polynomial inversion for the substrate optical constant of a transparent-film transparent-substrate system is analytically derived and presented. The reader is spared the derivation procedure which includes involved numerous transformations and algebraic manipulations. Also, closed-form formulae are given to calculate the film thickness of the system. The closed-form formulae are algebraically accurate and introduce no errors. A study of the effects of the experimental random and systematic errors of modern-day ellipsometers is presented which proves the very high accuracy of the method. The method does not need a guessed starting solution and it always provides the correct answer with no divergence. Those are important advantages over the widely used, manufacturer supplied, fitting routines.

Citation Download Citation

M. Elshazly-Zaghloul, Y. A. Zaghloul, and A. R. M. Zaghloul "Transmission ellipsometry of transparent-film transparent-substrate systems: polynomial inversion for the substrate optical constant", Proc. SPIE 6286, Advances in Thin-Film Coatings for Optical Applications III, 62860G (28 August 2006); https://doi.org/10.1117/12.681006

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