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14 August 2006 Self-calibration of wavefront testing interferometers by use of diffractive elements
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Abstract
Self-calibration techniques in interferometry imply the absolute determination of the interferometer's systematic error without the need for a high-quality, precisely-known calibration standard. By taking separate measurements at different positions and under different orientations, the interferometer's error can be determined in an absolute manner even with non-perfect optical elements. This paper discusses the versatile possibilities of using diffractive optical elements as calibration tools in wavefront testing interferometry.
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Stephan Reichelt, Hans Tiziani, and Hans Zappe "Self-calibration of wavefront testing interferometers by use of diffractive elements", Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 629205 (14 August 2006); https://doi.org/10.1117/12.680660
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