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14 August 2006 Wavefront sensing by an aperiodic diffractive microlens array
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Abstract
Shack-Hartmann sensors are commonly used wavefront sensors in a large field of applications, like adaptive optics, beam characterization and non-contact measurements. They are popular because of the ease of use and the robustness of the sensor. We introduce a new way to improve the performance of miniaturized and mass-producible optical wavefront sensors for industrial inspection: A sensor design due to an aperiodic diffractive element working as microlens array allows the use of small and cost-efficient detector chips. The diffractive element was optimized using raytracing and thin element approximation (done in Zemax). As an example, we present the design and realization of a sensor for laboratory use with a measurement diameter of 20mm. We show an example measurement and results concerning dynamic range. The measurement accuracy was determined by measuring spherical waves.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lars Seifert, Thomas Ruppel, Tobias Haist, and Wolfgang Osten "Wavefront sensing by an aperiodic diffractive microlens array", Proc. SPIE 6293, Interferometry XIII: Applications, 629302 (14 August 2006); https://doi.org/10.1117/12.677845
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