Non-destructive structural homogeneity of MOEMS arrays: applications of a through-transmissive-media interferometer on a digital mirror device-spatial light modulator

L. M. Heine; P. I. Oden

doi:10.1117/12.684222

14 August 2006 Non-destructive structural homogeneity of MOEMS arrays: applications of a through-transmissive-media interferometer on a digital mirror device-spatial light modulator

L. M. Heine, P. I. Oden

Author Affiliations +

Proceedings Volume 6293, Interferometry XIII: Applications; 62930C (2006) https://doi.org/10.1117/12.684222
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

Interrogation tools are the key to a thorough understanding of any technology. Texas Instruments' DLP^(R) Products - Digital Mirror Device is no exception to this rule. We will discuss the application of a non-destructive, through-glass interferometer system toward gaining insight to the degree of structural uniformity of a statistically significant sampling of micro-opto-electromechanical (MOEM) mirrors as used in our product line. In the course of providing this information, instrumentation details such as reliability and reproducibility of measurements obtained on this interferometer will be discussed. Additionally, the importance of this mechanical uniformity to displaying images with this spatial light modulator (SLM) will be discussed as well.

Citation Download Citation

L. M. Heine and P. I. Oden "Non-destructive structural homogeneity of MOEMS arrays: applications of a through-transmissive-media interferometer on a digital mirror device-spatial light modulator", Proc. SPIE 6293, Interferometry XIII: Applications, 62930C (14 August 2006); https://doi.org/10.1117/12.684222

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