A white-light interferometer for inner cylindrical surfaces

A. Albertazzi G. Jr.; M. R. Viotti; A. Dal Pont

doi:10.1117/12.678050

14 August 2006 A white-light interferometer for inner cylindrical surfaces

A. Albertazzi G. Jr., M. R. Viotti, A. Dal Pont

Proceedings Volume 6293, Interferometry XIII: Applications; 62930F (2006) https://doi.org/10.1117/12.678050
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

This paper introduces a new design of a white light interferometer, suitable for measurement of inner cylindrical or quasi-cylindrical parts. A high precision 45° conical mirror is used to direct collimated light in the radial direction to the surface to be measured. The image of the measured surface, distorted by the conical mirror, is formed in the sensor plane of a digital camera. A mapping algorithm is used to reconstruct the cylindrical geometry from the distorted image. The remaining of the interferometer is quite similar to a conventional white light interferometer, where a flat reference mirror is scanned through the measurement range while an algorithm is searching for the maximum contrast position of the interference pattern. The alignment and calibration of the interferometer using a reference master piece are described and discussed. The performance evaluation of the interferometer as well as practical applications are also presented and discussed. This new configuration makes possible to measure inner surfaces in true cylindrical coordinates.

Citation Download Citation

A. Albertazzi G. Jr., M. R. Viotti, and A. Dal Pont "A white-light interferometer for inner cylindrical surfaces", Proc. SPIE 6293, Interferometry XIII: Applications, 62930F (14 August 2006); https://doi.org/10.1117/12.678050

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