Image processing in optic damage inspection of dark-field imaging

Zhi-hong Sun; Zhi-tao Peng; Hua Liu; Ya-ping Xie; Feng Jing; Deng-sheng Wu

doi:10.1117/12.683188

7 September 2006 Image processing in optic damage inspection of dark-field imaging

Zhi-hong Sun, Zhi-tao Peng, Hua Liu, Ya-ping Xie, Feng Jing, Deng-sheng Wu

Proceedings Volume 6294, Infrared and Photoelectronic Imagers and Detector Devices II; 62940D (2006) https://doi.org/10.1117/12.683188
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

Damage inspection of the large aperture components is required for Large, high-power laser systems. Dark-field imaging technology is used to enhance resolution of defects. Because there are several of the optics which are laid with Brewster angle in optics online inspection and the image collected by CCD includes many noises, so the image are quite complex. A kind of image processing method is introduced, which is based on classical method about edge detection. Gray restrain is used and the relations between the pixel and its eight neighbours are considered in calculating the gradient. The defect size is measured and damage defect of optics is analyzed using the image processing methodology. The new approach produces nice result.

Citation Download Citation

Zhi-hong Sun, Zhi-tao Peng, Hua Liu, Ya-ping Xie, Feng Jing, and Deng-sheng Wu "Image processing in optic damage inspection of dark-field imaging", Proc. SPIE 6294, Infrared and Photoelectronic Imagers and Detector Devices II, 62940D (7 September 2006); https://doi.org/10.1117/12.683188

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