Off-plane grazing-incidence fan-groove blazed grating to serve as a high-efficiency spectral purity filter for EUV lithography

Leonid I. Goray

doi:10.1117/12.678151

29 August 2006 Off-plane grazing-incidence fan-groove blazed grating to serve as a high-efficiency spectral purity filter for EUV lithography

Leonid I. Goray

Author Affiliations +

Proceedings Volume 6317, Advances in X-Ray/EUV Optics, Components, and Applications; 63170O (2006) https://doi.org/10.1117/12.678151
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

Reflecting large-blaze-angle diffraction gratings operating in the off-plane grazing configuration can be used to advantage as high-efficiency tools permitting separation and focusing of a 2%-wavelength about 13.5-nm. A cooled multiple grating with fan-groove geometry is used as a model to select the desired spectral range and obtain a record-high efficiency and stigmatic image focusing for a high dispersion in adjacent orders. A maximal relative efficiency of 0.96-0.99 and reflectances of 0.71-0.96 can be readily obtained with an off-plane fine-pitch grating intercepting at incidence angles of 70-85° a converging unpolarized light beam from an EUV collector, a figure higher than that of a grating in an in-plane mount. An absolute efficiency of ~0.72, calculated with a PCGrate-SX code using the AFM-measured groove profile, is reached in the -1st order of a Mo-coated 200-nm-pitch Si test grating in unpolarized light.

Citation Download Citation

Leonid I. Goray "Off-plane grazing-incidence fan-groove blazed grating to serve as a high-efficiency spectral purity filter for EUV lithography", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 63170O (29 August 2006); https://doi.org/10.1117/12.678151

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