Wave-optical simulations for designing and evaluating hard x-ray reflective optics

H. Mimura; S. Matsuyama; H. Yumoto; S. Handa; A. Shibatani; K. Katagishi; Y. Sano; Y. Nishino; M. Yabashi; K. Tamasaku; T. Ishikawa; K. Yamauchi

doi:10.1117/12.681944

29 August 2006 Wave-optical simulations for designing and evaluating hard x-ray reflective optics

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, A. Shibatani, K. Katagishi, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Author Affiliations +

Proceedings Volume 6317, Advances in X-Ray/EUV Optics, Components, and Applications; 631718 (2006) https://doi.org/10.1117/12.681944
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

Focusing methods using mirror optics are intensively studied in the field of X-ray microscopy because mirror optics has useful features such as high photon efficiency and no chromatic aberrations. Employing a wave-optical method, we investigated the relationship between the nature of figure errors on the mirror surface and optics performances. We also evaluated glancing angle sensitivity to focused beam and beamwaist stuructures. Obtained results showed unprecedented degrees of surface figure accuracy such as higher than 4 nm was required to realize nearly diffraction limited nanobeam. This simulation can also give important information for align KB mirrors setup.

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H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, A. Shibatani, K. Katagishi, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi "Wave-optical simulations for designing and evaluating hard x-ray reflective optics", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631718 (29 August 2006); https://doi.org/10.1117/12.681944

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