High-resolution x-ray tomography using laboratory sources

Andrei Tkachuk; Michael Feser; Hongtao Cui; Fred Duewer; Hauyee Chang; Wenbing Yun

doi:10.1117/12.682383

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7 September 2006 High-resolution x-ray tomography using laboratory sources

Andrei Tkachuk, Michael Feser, Hongtao Cui, Fred Duewer, Hauyee Chang, Wenbing Yun

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Proceedings Volume 6318, Developments in X-Ray Tomography V; 63181D (2006) https://doi.org/10.1117/12.682383
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

X-ray computed tomography (XCT) is a powerful nondestructive 3D imaging technique, which enables the visualization of the three dimensional structure of complex, optically opaque samples. High resolution XCT using Fresnel zone plate lenses has been confined in the past to synchrotron radiation centers due to the need for a bright and intense source of x-rays. This confinement severely limits the availability and accessibility of x-ray microscopes and the wide proliferation of this methodology. We are describing a sub-50nm resolution XCT system operating at 8 keV in absorption and Zernike phase contrast mode based on a commercially available laboratory x-ray source. The system utilizes high-efficiency Fresnel zone plates with an outermost zone width of 35 nm and 700 nm structure height resulting in a current spatial resolution better than 50 nm. In addition to the technical description of the system and specifications, we present application examples in the semiconductor field.

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Andrei Tkachuk, Michael Feser, Hongtao Cui, Fred Duewer, Hauyee Chang, and Wenbing Yun "High-resolution x-ray tomography using laboratory sources", Proc. SPIE 6318, Developments in X-Ray Tomography V, 63181D (7 September 2006); https://doi.org/10.1117/12.682383

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