Influence Of Sputter Effects On The Resolution In X-Ray Mask Repair

H. Betz; A. Heuberger; N. P. Economou; D . C. Shaver

doi:10.1117/12.963670

30 June 1986 Influence Of Sputter Effects On The Resolution In X-Ray Mask Repair

H. Betz, A. Heuberger, N. P. Economou, D . C. Shaver

Proceedings Volume 0632, Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V; (1986) https://doi.org/10.1117/12.963670
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

When Focused-Ion-Beam Milling is used for repairing opaque defects on X-ray masks, the specific sputter effects such as redeposition of the sputtered material and reflection of the primary ions influence the obtained resolution appreciably. This physical behaviour leads to edge angles 4 90° and to a shift of the milled pattern as well as to a specific kind of 'proximity effect'. That means, the repair of a defect could generate new defects due to the redeposited material which have to be corrected again. Furthermore, the achievable aspect ratio which depends on the sputter yield is limited to approximately 5 for gold under practical conditions.

Citation Download Citation

H. Betz, A. Heuberger, N. P. Economou, and D . C. Shaver "Influence Of Sputter Effects On The Resolution In X-Ray Mask Repair", Proc. SPIE 0632, Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V, (30 June 1986); https://doi.org/10.1117/12.963670

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available