Paper
30 August 2006 Enhanced THz transmission apertures through sub-wavelength annular apertures
Author Affiliations +
Abstract
We report on the development of a surface micromachined process for the fabrication of coaxial apertures surrounded by periodic grooves. The process uses a combination of copper electroforming and the negative epoxy based resist, SU8, as a thin flexible substrate. The device dimensions are suitable for the implementation of filters at THz frequencies, and measurements show a pass band centred around 1.5 THz. These devices could form the basis of the next generation of THz biosensors.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. J. Gallant, J. A. Levitt, M. Kaliteevski, D. Wood, M. C. Petty, R. A. Abram, S. Brand, and J. M. Chamberlain "Enhanced THz transmission apertures through sub-wavelength annular apertures", Proc. SPIE 6323, Plasmonics: Metallic Nanostructures and their Optical Properties IV, 632316 (30 August 2006); https://doi.org/10.1117/12.680552
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Cited by 1 scholarly publication.
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KEYWORDS
Terahertz radiation

Copper

Microwave radiation

Semiconducting wafers

Silicon

Optical filters

Signal attenuation

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