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11 September 2006 Multiphoton laser lithography for the fabrication of plasmonic components
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Abstract
In this contribution, we demonstrate multi-photon femtosecond laser lithography for the fabrication and rapid prototyping of plasmonic components. Using this technology different dielectric and metallic SPP-structures can be fabricated in a low-cost and time-efficient way. Resolution limits of this technology will be discussed. Investigations of the optical properties of the fabricated SPP-structures by far-field leakage radiation microscopy will be reported.
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Sven Passinger, Jürgen Koch, Roman Kiyan, Carsten Reinhardt, and Boris N. Chichkov "Multiphoton laser lithography for the fabrication of plasmonic components", Proc. SPIE 6324, Plasmonics: Nanoimaging, Nanofabrication, and their Applications II, 63240U (11 September 2006); https://doi.org/10.1117/12.680418
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