Detecting Straight Edge In General Partially Coherent Cases

Jian Yang; Shudong Wu; Zhijiang Wang

doi:10.1117/12.963725

20 August 1986 Detecting Straight Edge In General Partially Coherent Cases

Jian Yang, Shudong Wu, Zhijiang Wang

Author Affiliations +

Proceedings Volume 0633, Optical Microlithography V; (1986) https://doi.org/10.1117/12.963725
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

On the basis of the partially coherent theory of light, an edge-threshold equation was deduced. The main point is an introduced new parameter, which shows the effect of the coherence and aberration of measuring system to edge detection. Curves of the new parameter vs coherence parameter of the microscope which is free of aberration are displayed in the paper.

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Jian Yang, Shudong Wu, and Zhijiang Wang "Detecting Straight Edge In General Partially Coherent Cases", Proc. SPIE 0633, Optical Microlithography V, (20 August 1986); https://doi.org/10.1117/12.963725

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