Catadioptric projection optical system for flat panel exposure tool

Michio Kohno; Kiyoshi Fukami; Hitoshi Yoshioka; Shu Watanabe; Akiyoshi Suzuki

doi:10.1117/12.692265

12 July 2006 Catadioptric projection optical system for flat panel exposure tool

Michio Kohno, Kiyoshi Fukami, Hitoshi Yoshioka, Shu Watanabe, Akiyoshi Suzuki

Proceedings Volume 6342, International Optical Design Conference 2006; 63420Y (2006) https://doi.org/10.1117/12.692265
Event: International Optical Design Conference 2006, 2006, Vancouver, BC, Canada

Abstract

An advanced catadioptric projection optics installed on state-of-the-art flat panel exposure tool is introduced. Both scaling up and aspheric lenses added to the conventional two-mirror optics have enlarged off-axis good imaging field, and contributed to increase the productivity of the machine. This paper discusses the optical characteristics of the advanced optics, and refers to its contribution to the performance of a large flat panel display (FPD) exposure tool. Additionally, not only the fabrication technology of large optical parts in the projection optics but also illumination optical system and mask /plate alignment system in the exposure tool are also disclosed.

Citation Download Citation

Michio Kohno, Kiyoshi Fukami, Hitoshi Yoshioka, Shu Watanabe, and Akiyoshi Suzuki "Catadioptric projection optical system for flat panel exposure tool", Proc. SPIE 6342, International Optical Design Conference 2006, 63420Y (12 July 2006); https://doi.org/10.1117/12.692265

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available