The optical design for microlithographic lenses

Yasuhiro Ohmura

doi:10.1117/12.692315

18 July 2006 The optical design for microlithographic lenses

Yasuhiro Ohmura

Proceedings Volume 6342, International Optical Design Conference 2006; 63421T (2006) https://doi.org/10.1117/12.692315
Event: International Optical Design Conference 2006, 2006, Vancouver, BC, Canada

Abstract

The evolution of the microlithographic lens is described based on an analysis of main features of the lenses in each generation. Even current lenses, comprising more than 20 elements, can be understandable through the analysis.

Citation Download Citation

Yasuhiro Ohmura "The optical design for microlithographic lenses", Proc. SPIE 6342, International Optical Design Conference 2006, 63421T (18 July 2006); https://doi.org/10.1117/12.692315

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