Determination of measurement uncertainty in the developed instantaneous phase shifting interferometer

N. R. Sivakumar; B. Tan; K. Venkatakrishnan

doi:10.1117/12.692232

12 July 2006 Determination of measurement uncertainty in the developed instantaneous phase shifting interferometer

N. R. Sivakumar, B. Tan, K. Venkatakrishnan

Proceedings Volume 6342, International Optical Design Conference 2006; 63421W (2006) https://doi.org/10.1117/12.692232
Event: International Optical Design Conference 2006, 2006, Vancouver, BC, Canada

Abstract

In this paper, detection of system noise in the optical layout for instantaneous phase shifting interferometry is discussed. Experiments were carried out on a diamond turned aluminum surface on the developed interferometer. The results were then compared with results from a commercial profiler to ascertain the uncertainty in the developed system. The uncertainties in the developed system were attributed to the larger measurement area, compared to that of the commercial profiler, and the use of nonstandard reference surface for measurement.

Citation Download Citation

N. R. Sivakumar, B. Tan, and K. Venkatakrishnan "Determination of measurement uncertainty in the developed instantaneous phase shifting interferometer", Proc. SPIE 6342, International Optical Design Conference 2006, 63421W (12 July 2006); https://doi.org/10.1117/12.692232

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