MEMS motion measurement system using differential laser Doppler and its key techniques

Changlin Leng; Guoxiong Zhang; Yin Zhong; Xin Hong; Chengzhi Jiang

doi:10.1117/12.693653

10 June 2006 MEMS motion measurement system using differential laser Doppler and its key techniques

Changlin Leng, Guoxiong Zhang, Yin Zhong, Xin Hong, Chengzhi Jiang

Proceedings Volume 6344, Advanced Laser Technologies 2005; 63442L (2006) https://doi.org/10.1117/12.693653
Event: Advanced Laser Technologies 2005, 2005, Tianjin, China

Abstract

Motion analysis of Micro-electro-mechanical system (MEMS) is a powerful diagnostic tool enabling evaluation of the dynamic behaviour and the status of MEMS. A backscattering differential laser Doppler system is presented. The working principle and optical diagram of the system are explained in detail. In accordance with the characteristic of the measurement system, high-performance phase-locked loop is used to detect a weak measurement signal. Then measurement signal is transferred to computer and further analyzed there. Furthermore, a laser focusing method is described to improve the measurement. The focusing system is composed of a spatial filter and an aspheric lens C240TM-A, and focal spot size is less than 50 um. The silicon micromachined resonator is used as an example in experiments, and the resonant frequencies and the mean amplitude of MEMS are determined. Experimental results indicate that dynamic characteristics of MEMS can be measured well.

Citation Download Citation

Changlin Leng, Guoxiong Zhang, Yin Zhong, Xin Hong, and Chengzhi Jiang "MEMS motion measurement system using differential laser Doppler and its key techniques", Proc. SPIE 6344, Advanced Laser Technologies 2005, 63442L (10 June 2006); https://doi.org/10.1117/12.693653

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