The estimation of uncertainties in phase shift measurements using homodyne laser interferometry

Christiaan S. Veldman

doi:10.1117/12.693096

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21 June 2006 The estimation of uncertainties in phase shift measurements using homodyne laser interferometry

Christiaan S. Veldman

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Proceedings Volume 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; 634502 (2006) https://doi.org/10.1117/12.693096
Event: Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 2006, Ancona, Italy

Abstract

Scientists have researched the nonlinearity of laser interferometer systems in various degrees of detail over the past decades. This research has delivered numerous methods of determining the causes and explaining the sources of nonlinearity. Some mathematical formulae to determine the magnitude of the nonlinearity and methods how to minimize the nonlinearity has been reported. All of which emphatically proves that in practice, nonlinearity in interferometers exist and cannot be eliminated. The residual nonlinearity sources are investigated and their error contribution with respect to the interferometer's phase response as part of the complex (magnitude and phase) displacement measurement is reported on. These error components are used to estimate the uncertainty of measurement for phase shift measurements in homodyne laser interferometry as prescribed in the ISO "Guide to the Expression of Uncertainty in Measurement" (GUM).

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Christiaan S. Veldman "The estimation of uncertainties in phase shift measurements using homodyne laser interferometry", Proc. SPIE 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 634502 (21 June 2006); https://doi.org/10.1117/12.693096

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