Micro- and nanoprocessing of organic polymers using a laser plasma XUV source

Henryk Fiedorowicz; Andrzej Bartnik; Roman Jarocki; Libor Juha; Jerzy Kostecki; Rafal Rakowski; Miroslaw Szczurek

doi:10.1117/12.738157

26 April 2007 Micro- and nanoprocessing of organic polymers using a laser plasma XUV source

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Libor Juha, Jerzy Kostecki, Rafal Rakowski, Miroslaw Szczurek

Proceedings Volume 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; 63461H (2007) https://doi.org/10.1117/12.738157
Event: XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2006, Gmunden, Austria

Abstract

Laser plasmas generated in result of interaction of intense laser pulses with matter are efficient sources of XUV radiation in the energy range from about 50 eV to 500 eV. The results of experiments on micro- and nanoprocessing of organic polymers using a laser plasma XUV source based on a laser-irradiated gas puff target are presented and discussed.

Citation Download Citation

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Libor Juha, Jerzy Kostecki, Rafal Rakowski, and Miroslaw Szczurek "Micro- and nanoprocessing of organic polymers using a laser plasma XUV source", Proc. SPIE 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 63461H (26 April 2007); https://doi.org/10.1117/12.738157

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