Preparation and properties of nanoporous alumina-based humidity sensors

Adam Madany; Piotr Jasiński; Grzegorz Jasiński; Bogdan Chachulski; Antoni Nowakowski

doi:10.1117/12.721044

20 October 2006 Preparation and properties of nanoporous alumina-based humidity sensors

Adam Madany, Piotr Jasiński, Grzegorz Jasiński, Bogdan Chachulski, Antoni Nowakowski

Proceedings Volume 6348, Optoelectronic and Electronic Sensors VI; 63480C (2006) https://doi.org/10.1117/12.721044
Event: Optoelectronic and Electronic Sensors VI, 2006, Zakopane, Poland

Abstract

In this paper preparation method of nano-porous alumina based humidity sensors is presented. Investigation of relation between technological process parameters, sensor's porous layer structure and electric parameters is main aim of this study. Surface morphology was investigated by scanning electron microscopy. Impedance spectroscopy was used to identify electrical parameters of the sensor.

Citation Download Citation

Adam Madany, Piotr Jasiński, Grzegorz Jasiński, Bogdan Chachulski, and Antoni Nowakowski "Preparation and properties of nanoporous alumina-based humidity sensors", Proc. SPIE 6348, Optoelectronic and Electronic Sensors VI, 63480C (20 October 2006); https://doi.org/10.1117/12.721044

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available