Feasibility study of mask fabrication in double exposure technology

Jong Gul Doh; Sang Hee Lee; Je Bum Yoon; Doo Youl Lee; Seong Yong Cho; Byung Gook Kim; Seong Woon Choi; Woo Sung Han

doi:10.1117/12.686523

20 October 2006 Feasibility study of mask fabrication in double exposure technology

Jong Gul Doh, Sang Hee Lee, Je Bum Yoon, Doo Youl Lee, Seong Yong Cho, Byung Gook Kim, Seong Woon Choi, Woo Sung Han

Proceedings Volume 6349, Photomask Technology 2006; 63491U (2006) https://doi.org/10.1117/12.686523
Event: SPIE Photomask Technology, 2006, Monterey, California, United States

Abstract

With decreasing the design node, there are some candidates for the optical lithography technology. Double Exposure Technology (DET) is the one of the solution to extend the resolution limit down to k1 less than 0.25 for the next generation devices. To accomplish DET, photomask MTT, CD uniformity, and the overlay between the layers for the dual exposure are important as the photomask process aspect. MTT and CD uniformity have been frequently discussed for Single Exposure Technology (SET), but the overlay and the registration have not been discussed yet with the view of DET. In this work, the feasibility of mask fabrication, especially the overlay and the registration for DET are analyzed. The current mask limit of DET is discussed considering MTT, uniformity, and overlay.

Citation Download Citation

Jong Gul Doh, Sang Hee Lee, Je Bum Yoon, Doo Youl Lee, Seong Yong Cho, Byung Gook Kim, Seong Woon Choi, and Woo Sung Han "Feasibility study of mask fabrication in double exposure technology", Proc. SPIE 6349, Photomask Technology 2006, 63491U (20 October 2006); https://doi.org/10.1117/12.686523

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available