Nanoscale measurement technique of in-plane motion for MEMS based on phase correlation method

Zhi Chen; Xiaodong Hu; Cuiyun Jin; Ian Lan

doi:10.1117/12.717255

6 November 2006 Nanoscale measurement technique of in-plane motion for MEMS based on phase correlation method

Zhi Chen, Xiaodong Hu, Cuiyun Jin, Ian Lan

Proceedings Volume 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence; 63573P (2006) https://doi.org/10.1117/12.717255
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

In order to measure motion characteristic and dynamic parameters of MEMS resonator in every moment based on the techniques of stroboscopic imaging clear motion images for every moment in one cycle are obtained. Using technique of Phase correlation method to process motion images of MEMS resonator the dynamic parameters are got. The results give important reference to MEMS designation. In this paper we derive a completely analytical N-cubed algorithm based on Phase correlation method. MEMS motion process is analyzed using the algorithm. The amplitude-phase curve of MEMS in special driving frequency is got. The phase-frequency character is also analyzed. And the amplitude-frequency curve is acquired through sweep frequency measurement. Experimental results indicate that the repetition of measurement is 5nm.

Citation Download Citation

Zhi Chen, Xiaodong Hu, Cuiyun Jin, and Ian Lan "Nanoscale measurement technique of in-plane motion for MEMS based on phase correlation method", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63573P (6 November 2006); https://doi.org/10.1117/12.717255

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Microelectromechanical systems

Evolutionary algorithms

Motion measurement

Resonators

Detection and tracking algorithms

Algorithm development

Image processing

Show All Keywords

Keywords/Phrases

Search In:

Publication Years