A silicon-based subwavelength structure suitable for sensitive molecular detection

G. J. Sonek; V. G. Kreismanis

doi:10.1117/12.686423

19 October 2006 A silicon-based subwavelength structure suitable for sensitive molecular detection

G. J. Sonek, V. G. Kreismanis

Proceedings Volume 6370, Nanomaterial Synthesis and Integration for Sensors, Electronics, Photonics, and Electro-Optics; 63701H (2006) https://doi.org/10.1117/12.686423
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

Subwavelength structures (SWS), a form of diffractive optic, are well-known for their ability to function as polarizers and anti-reflection coatings. They can also be used to create narrowband optical filters whose surface reflectance spectra exhibit resonant peaks that are highly wavelength dependent, especially as the surface index is modified by the deposition or adsorption of biomaterials such as molecules or cells. In this study, we report on the design and fabrication of SWS structures in silicon that are suitable for use as biosensors in sensitive molecular detection. The structures combine a two-dimensional dielectric grating and Si/SiO₂ optical waveguide to create a surface that can function as a narrowband optical filter. The SWS structures were fabricated using a combination of three-beam interference lithography and reactive-ion etching in a CBrF₃ plasma. This produced a two-dimensional periodic nanostructure grating array, having a period of ~450 nm and air pores of ~265 nm, within a 300 nm thick silicon layer that serves as the core waveguide region of the filter. The ability to achieve sensitive molecular detection (< nm) is expected by virtue of working with high-index silicon-based structures, but may be practically limited by the need to detect the reflectance at near-infrared, rather than visible, wavelengths.

Citation Download Citation

G. J. Sonek and V. G. Kreismanis "A silicon-based subwavelength structure suitable for sensitive molecular detection", Proc. SPIE 6370, Nanomaterial Synthesis and Integration for Sensors, Electronics, Photonics, and Electro-Optics, 63701H (19 October 2006); https://doi.org/10.1117/12.686423

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