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12 October 2006 White light displacement sensor by spectro-polarization modulator
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Proceedings Volume 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV; 638205 (2006) https://doi.org/10.1117/12.689279
Event: Optics East 2006, 2006, Boston, Massachusetts, United States
Abstract
We propose a white light displacement sensor using a novel spectro-polarization modulator which generates spiral liner polarized light sorted along wavelength concentrically. It consists of a polarizer, a retarder with high order retardation, and a quarter wave plate. If we set the spiral polarizer after the spectro-polarization modulator, we can observe spectroscopic color concentrically. A displacement measurement method is proposed using chromatic aberration method and white light interferometer.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yukitoshi Otani, Toshitaka Wakayama, Dmitry Orlov, Norihiro Umeda, and Toru Yoshizawa "White light displacement sensor by spectro-polarization modulator", Proc. SPIE 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV, 638205 (12 October 2006); https://doi.org/10.1117/12.689279
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