Edge measurement using stereovision and phase-shifting methods

Qingying Hu; Kevin Harding; Don Hamilton

doi:10.1117/12.685423

12 October 2006 Edge measurement using stereovision and phase-shifting methods

Qingying Hu, Kevin Harding, Don Hamilton

Proceedings Volume 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV; 63820C (2006) https://doi.org/10.1117/12.685423
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

Three-dimensional edge measurement is critical in many applications such as blade manufacturing due to the stringent requirements on aerodynamic performance of blades. Optical metrology techniques provide very good tools in terms of speed and accuracy, but face some challenges as well, such as discontinuity, irregularity, and size variation in the edge shape. This paper presents several methods that include stereovision techniques to capture a sharp edge and phase-shifting to capture an edge profile of a blunt edge. For sharp edge measurement with stereovision, multiple cameras are used to view the edge from different directions. Then the captured images are processed to obtain the point cloud of the edge. For blunt edge measurement, a phase-shifting method is applied. After the edge profile is obtained, all edge information can be extracted. In this paper, different illumination methods are discussed and different edges are measured. Experimental data shows that these methods are practical in obtaining accurate edge or edge profile.

Citation Download Citation

Qingying Hu, Kevin Harding, and Don Hamilton "Edge measurement using stereovision and phase-shifting methods", Proc. SPIE 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV, 63820C (12 October 2006); https://doi.org/10.1117/12.685423

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available