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21 October 1986 Surface Characterization Of Grazing-Incidence Optics In The Extreme Ultraviolet And X-Ray Regions
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Proceedings Volume 0640, Grazing Incidence Optics; (1986) https://doi.org/10.1117/12.964356
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States
Abstract
Roughness and waviness on mirrors for use in grazing-incidence optical systems intended for the extreme ultraviolet and x-ray regions affect both the focusing properties of the mirrors and the scattered light they produce. The most important surface spatial wave-lengths of the roughness are in the 1- to 100-μm range and are easily measurable using conventional optical and mechanical techniques. Descriptions of some of these techniques will be given along with examples of measurements made on very smooth polished optical surfaces that are comparable to those used as grazing-incidence optics.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean M. Bennett "Surface Characterization Of Grazing-Incidence Optics In The Extreme Ultraviolet And X-Ray Regions", Proc. SPIE 0640, Grazing Incidence Optics, (21 October 1986); https://doi.org/10.1117/12.964356
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