Three-dimensional laser microfabrication

Saulius Juodkazis; Hiroaki Misawa

doi:10.1117/12.689384

29 September 2006 Three-dimensional laser microfabrication

Saulius Juodkazis, Hiroaki Misawa

Proceedings Volume 6400, Femtosecond Phenomena and Nonlinear Optics III; 640005 (2006) https://doi.org/10.1117/12.689384
Event: Optics/Photonics in Security and Defence, 2006, Stockholm, Sweden

Abstract

The mechanism of three-dimensional (3D) laser micro-structuring of dielectrics (resists, polymers, glasses, and crystals) by the direct laser writing is discussed. Overview of a light-matter interaction of a tightly-focused femtosecond pulse with dielectrics is presented. The void formation is demonstrated inside silica glass by a single picosecond pulse. Peculiarities of tight focusing and an axial superposition of two co-propagating pulses at the focus are revealed by numerical simulations. Potential of the fabricated 3D patterns in micro-photonics, micro-fluidics, and sensor applications is discussed.

Citation Download Citation

Saulius Juodkazis and Hiroaki Misawa "Three-dimensional laser microfabrication", Proc. SPIE 6400, Femtosecond Phenomena and Nonlinear Optics III, 640005 (29 September 2006); https://doi.org/10.1117/12.689384

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