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15 January 2007 Glancing angle deposited thin films and their applications in laser systems
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Glancing angle deposition (GLAD) is a novel way to produce nanostructural thin films with engineered porosity, and it is possible to make new optical components in laser systems. In this paper, ZrO2, SiO2 and TiO2 thin films were grown by electron beam evaporation with GLAD technique. Different microstructures were observed. The optical properties, such as transmittance and refractive index were characterized. As application of the GLAD thin films, several optical components were designed and fabricated, such as graded-index rugate filter, broadband antireflection coating and phase retardater for visible and near infrared laser systems. Finally, laser-induced damage threshold were measured and discussed.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jianda Shao, Sumei Wang, Zicai Shen, Xiaoyong Fu, Hongbo He, and Zhengxiu Fan "Glancing angle deposited thin films and their applications in laser systems", Proc. SPIE 6403, Laser-Induced Damage in Optical Materials: 2006, 640312 (15 January 2007);


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