Paper
18 January 2007 Measuring part per million thin film absorption during deposition
George Dubé, Arthur J. Braundmeier Jr., Steve Chelli, Roland Juhala, Anthony Webb
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Abstract
Waveguiding was used to measure the extinction coefficient of a thin film while it was being deposited in a vacuum chamber. Experimental results are presented and compared to calculations and measurements by other techniques.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George Dubé, Arthur J. Braundmeier Jr., Steve Chelli, Roland Juhala, and Anthony Webb "Measuring part per million thin film absorption during deposition", Proc. SPIE 6403, Laser-Induced Damage in Optical Materials: 2006, 64031F (18 January 2007); https://doi.org/10.1117/12.695179
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KEYWORDS
Absorption

Reflection

Thin films

Refractive index

Reflectivity

Signal detection

Mass attenuation coefficient

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