A fluidic micro-actuator with an integrated inductive position sensor

M. De Volder; J. Coosemans; F. Ceyssens; J. Peirs; R. Puers; D. Reynaerts

doi:10.1117/12.695525

20 December 2006 A fluidic micro-actuator with an integrated inductive position sensor

M. De Volder, J. Coosemans, F. Ceyssens, J. Peirs, R. Puers, D. Reynaerts

Proceedings Volume 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III; 64150F (2006) https://doi.org/10.1117/12.695525
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2006, Adelaide, Australia

Abstract

An important technological barrier in the development of microrobotic systems is the lack of compact sensor-actuator systems. This paper presents a piston-cylinder fluidic microactuator with an integrated inductive position sensor. Such positioning systems offer great opportunities for all devices that need to control a large number of degrees of freedom in a restricted volume. The main advantage of fluidic actuators is their high force and power density at microscale. The outside diameter of the actuator developed in this research is 1.3 mm and the length is 15 mm. The stroke is 12 mm, and the actuation force is more than 0.4 N at a supply pressure of 550 kPa. The position sensor consists of two coils wound around the cylinder of the actuator. The measurement principle is based on the change in coupling factor between the coils as the piston moves in the actuator. The sensor is extremely small since one layer of 25 μm copper wire is sufficient to achieve an accuracy of 10 μm over the total stroke. Measurements showed that the actuator achieves a positioning accuracy of 20 μm in closed loop control.

Citation Download Citation

M. De Volder, J. Coosemans, F. Ceyssens, J. Peirs, R. Puers, and D. Reynaerts "A fluidic micro-actuator with an integrated inductive position sensor", Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64150F (20 December 2006); https://doi.org/10.1117/12.695525

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available