Optimization of MEMS fabrication process design by virtual experiments

T. Schmidt; K. Hahn; T. Binder; J. Popp; A. Wagener; R. Brück

doi:10.1117/12.695427

20 December 2006 Optimization of MEMS fabrication process design by virtual experiments

T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, R. Brück

Proceedings Volume 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III; 64150R (2006) https://doi.org/10.1117/12.695427
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2006, Adelaide, Australia

Abstract

Fabrication processes for MEMS are characterized by a variety of different process technologies and materials. Unlike in microelectronics the fabrication process is relevant to all design stages within the design flow. Discovering the correct combination of process steps, materials and process parameters usually requires a large number of experiments. This paper presents a new software system that supports the MEMS designers in managing their process knowledge and in performing virtual experiments using SILVACO TCAD tools.

Citation Download Citation

T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, and R. Brück "Optimization of MEMS fabrication process design by virtual experiments", Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64150R (20 December 2006); https://doi.org/10.1117/12.695427

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