Control of cohesive-force ordering in organic-inorganic hybrid pillar arrays

Hiroyo Segawa; Satoshi Yamaguchi; Tetsuji Yano; Shuichi Shibata

doi:10.1117/12.695798

20 December 2006 Control of cohesive-force ordering in organic-inorganic hybrid pillar arrays

Hiroyo Segawa, Satoshi Yamaguchi, Tetsuji Yano, Shuichi Shibata

Proceedings Volume 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III; 64151E (2006) https://doi.org/10.1117/12.695798
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2006, Adelaide, Australia

Abstract

Organic-Inorganic hybrid pillar arrays have been controlled by cohesive force during drying in photolithography. Two-dimensional periodic pillars with micrometer repetitions were fabricated from an organic-inorganic hybrid material. The pillars were gathered at the top and gtop-gatheringh pillar patterns were obtained depending on pillar sizes such as height of the pillars and distance between neighboring pillars and types of rinse liquids. The top-gathering pillar patterns could be obtained easily in the pillar arrays with same structural parameters using 1-PrOH as a rinse liquid rather than water. From in situ observation of the drying rinse liquids, it was found that the drying of 1-PrOH differs from that of water in the pillar arrays because of the difference in the contact angles. Top-gathering pillars were partially introduced in a homogeneous periodic pillar array by the different pillar formations between two types of rinse liquids.

Citation Download Citation

Hiroyo Segawa, Satoshi Yamaguchi, Tetsuji Yano, and Shuichi Shibata "Control of cohesive-force ordering in organic-inorganic hybrid pillar arrays", Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64151E (20 December 2006); https://doi.org/10.1117/12.695798

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